DOI

  • N. Voznesenskiy
  • M. Voznesenskaia
  • D. Jha
  • Heidi Ottevaere
  • M. Kujawinska
  • M. Trusiak
  • K. Lizdotewski
Almost hidden residual defects of a test surface can be revealed using high precision instrument such as a point diffraction interferometer (PDI). In general, PDI is engaged to display the figure of a surface or wavefront with subnanometer accuracy paying attention to low-frequency configurations. Such technique is suited to test EUV or X-ray optics. The tool described in the paper is able to map absolute profile deviations of several angstroms and therefore it provides a new vision of a surface under test of various quality, e.g. detects specific characteristics which immediately disclose either lapping or diamond turning has been used to form the substrate. Such inspection may help optimize the processes in early stage of shape forming before final configuring.
Original languageEnglish
Title of host publicationOptical Measurement Systems for Industrial Inspection X
EditorsPeter Lehmann, Armando Albertazzi Goncalves, Wolfgang Osten
PublisherSPIE
Number of pages8
Volume10329
ISBN (Electronic)9781510611030
ISBN (Print)978-1-5106-1103-0
DOIs
Publication statusPublished - 2017
EventOptical Measurement Systems for Industrial Inspection X - Munich, Germany
Duration: 26 Jun 201729 Jun 2017

Publication series

NameProceedings of SPIE

Conference

ConferenceOptical Measurement Systems for Industrial Inspection X
CountryGermany
CityMunich
Period26/06/1729/06/17

    Research areas

  • EUV optics, X-ray optics, asphere, damping stray interference, high numerical aperture, industrial application of point diffraction interferometer, point diffraction interferometry, sub-nanometer accuracy, surface quality inspection

ID: 32796479